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Cleanroom Actuators

Features 

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  • This actuator is for cleanrooms compliant with ISO Class 2.5, 3, and 3.5 (ISO 14644-1 standards).

Usage 

This actuator can be used in cleanrooms for food machinery, semiconductors, secondary batteries, and more.

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Slider Type


EleCylinder

24V Drive
Affordable
Long Stroke

  • Stroke: 50-1500mm
  • Max payload: 80kg (horizontal), 55kg (vertical)
  • Max speed: 1350mm/sec
  • Cleanliness: Equivalent to ISO 14644-1 Class 2.5/3

This is an electric actuator with a controller integrated, designed with a focus on "easy," "high performance," and "profitability" for point-to-point positioning. It is ideal for applications in clean environments.


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RCP6(S)CR Series (RCP5CR/RCP4CR)

24V Drive
Affordable

  • Stroke: 25–1100mm
  • Maximum payload:
    100kg (horizontal), 55kg (vertical)
  • Maximum speed:1440mm/sec
  • Cleanliness: Equivalent to ISO 14644-1 Class 2.5

This actuator uses a pulse motor, which allows for a low-cost controller, making it an affordable option for cleanroom applications.


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RCS4CR Series (RCS3CR/RCS2CR)

100/200V Drive
Affordable

  • Stroke: 50–1100mm
  • Max payload:
    100kg (horizontal), 50kg (vertical)
  • Max speed: 1800mm/sec
  • Cleanliness: Equivalent to ISO 14644-1 Class 2.5

This actuator features a servo motor powered by 100/200V. It offers a more affordable option compared to single-axis robots and is ideal for applications requiring high speed and high payload capacity.


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ISDBCR Series (SSPDACR/ISDACR)

100/200V Drive
High Rigidity
High Precision

  • Stroke: 100–2500mm
  • Maximum payload:120kg (horizontal), 60kg (vertical)
  • Maximum speed: 2000mm/sec
  • Cleanliness: Equivalent to ISO 14644-1 Class 2.5

This actuator boasts high speed and high thrust capabilities. Additionally, an anti-static model is available for applications requiring electrostatic protection.


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RCACR Series

24V Drive

  • Stroke: 50–600mm
  • Max payload: 18kg (horizontal), 6kg (vertical
  • Max speed: 1300mm/sec
  • Cleanliness: Equivalent to ISO 14644-1 Class 2.5

This series features a low-cost controller due to its 24V drive system. Equipped with a servo motor, it operates more quietly compared to pulse motor-based models.


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Rod Type


RCA2CR Series

24V Drive
Quiet
Compact

  • Stroke: 25–50mm
  • Max payload: 6kg (horizontal), 1.5kg (vertical)
  • Max speed: 300mm/sec
  • Cleanliness: Class 100 (0.1μm, Fed.Std.209D)

This compact series features a low-cost controller due to its 24V drive system. Equipped with a servo motor, it operates more quietly compared to pulse motor-based models.


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RCS2CR Series

100/200V Drive
Compact

  • Stroke: 50–75mm
  • Max payload: 20kg (horizontal), 6kg (vertical)l
  • Max speed: 380mm/sec
  • Cleanliness: Class 100 (0.1μm, Fed.Std.209D)

This actuator features a servo motor with 100/200V drive. It is a compact series designed with a shortened overall length.


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Rotary Type


RCP2CR Series

24V Drive
Affodable

  • Operating range: 300°/360° (multi-rotation)
  • Max torque: ~4.6N
  • Permissible moment of inertia: ~0.03kg·m²
  • Cleanliness: Class 10 (0.1μm, Fed.Std.209D)

This product uses a pulse motor, making the controller a cost-effective choice.


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DD Motor Series

200V Drive
High Torque
High Precision

  • Operating range: 360° (multi-rotation)
  • Max torque: ~75N
  • Permissible moment of inertia: ~1.8kg·m²
  • Cleanliness: Class 2.5/3 equivalent (ISO 14644-1)

This large-diameter direct drive motor is equipped with a 200V servo motor, ensuring high torque and precision.


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SCARA Robots


IXP Series

24V Drive
Affordable

  • Arm Length: 350–650mm
  • Max Payload: 6kg
  • Fastest Cycle Time: 0.74 seconds or faster
  • Cleanliness: Class 3.5 equivalent (ISO 14644-1)

This is a compact and cost-effective SCARA robot equipped with a pulse motor, ideal for various applications.


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IXA Series

200V Drive
High Speed

  • Arm Length: 300–600mm
  • Max Payload: 10kg
  • Fastest Cycle Time: 0.27 seconds or faster
  • Cleanliness: Class 3 (ISO 14644-1)

The industry's fastest SCARA robot, equipped with internal cabling, making it suitable for equipment with height restrictions.


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IX Series

200V Drive
High Rigidity

  • Arm Length: 120–800mm
  • Max Payload: 20kg
  • Fastest Cycle Time: 0.38 seconds or faster
  • Cleanliness: Equivalent to Class 2.5 (ISO 14644-1)

By vacuuming the air inside the unit, it supports a cleanliness level equivalent to Class 10.


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